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The influence of coating structure on micromachine stiction

✍ Scribed by J.G. Kushmerick; M.G. Hankins; M.P. de Boer; P.J. Clews; R.W. Carpick; B.C. Bunker

Book ID
110272745
Publisher
Springer US
Year
2001
Tongue
English
Weight
391 KB
Volume
10
Category
Article
ISSN
1023-8883

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