The incorporation of transition metals into polyhedral oligosilsesquioxane polymers
โ Scribed by Timothy S. Haddad; Joseph D. Lichtenhan
- Publisher
- Springer
- Year
- 1995
- Tongue
- English
- Weight
- 409 KB
- Volume
- 5
- Category
- Article
- ISSN
- 1053-0495
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๐ SIMILAR VOLUMES
## Abstract This article provides a comprehensive review of the synthesis, properties and applications of organometallic polymers of the transition metals. The different classes of organometallic polymers are described according to their structural makeโup, as well as by their methods of synthesis.
## Abstract Metals may be chemically incorporated into organic lithographic resists that contain or can be functionalized with ๏ฃฟOH groups. A wide range of metal incorporation (0.04โ12% of total solids by weight) has been demonstrated for AZโ1370 (Shipley), a diazoโtype photoโ and electron resist. T