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The inclusion of secondary electrons and Bremsstrahlung X-rays in an electron beam resist model

✍ Scribed by V.V. Ivin; M.V. Silakov; D.S. Kozlov; K.J. Nordquist; B. Lu; D.J. Resnick

Book ID
114155456
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
294 KB
Volume
61-62
Category
Article
ISSN
0167-9317

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