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The formation of moulds for 3D microstructures using excimer laser ablation

✍ Scribed by R. A. Lawes; A. S. Holmes; F. N. Goodall

Publisher
Springer-Verlag
Year
1996
Tongue
English
Weight
628 KB
Volume
3
Category
Article
ISSN
0946-7076

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Ablation of single and arrayed microstructures using an excimer laser is studied. The single feature microstructures are fabricated for evaluating the ablation mechanism, threshold fluence, and associated material removing (ablation) rate. The morphology changes during ablation are investigated with