Excimer laser patterned dielectric masks for the fabrication of diffractive optical elements by laser ablation

✍ Scribed by D. Schäfer; J. Ihlemann; K. Mann; G. Marowsky

• Publisher: Springer
• Year: 1999
• Tongue: English
• Weight: 250 KB
• Volume: 69
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s003390051408