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The formation and stability of sub-micron clusters in silane and argon plasmas

✍ Scribed by M. Hundhausen; L. Ley

Book ID: 117147114
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 907 KB
Volume: 137-138
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(05)80240-6

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