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Particulate formation and dusty plasma behaviour in argon-silane RF discharge

✍ Scribed by Bouchoule, A; Boufendi, L

Book ID: 120285978
Publisher: Institute of Physics
Year: 1993
Tongue: English
Weight: 901 KB
Volume: 2
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/2/3/011

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