✦ LIBER ✦
Two-dimensional spatial profiles of size and density of particulates grown in RF silane plasmas
✍ Scribed by Shiratani, M.; Kishigaki, N.; Kawasaki, H.; Fukuzawa, T.; Watanabe, Y.
- Book ID
- 117862727
- Publisher
- IEEE
- Year
- 1996
- Tongue
- English
- Weight
- 282 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0093-3813
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