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Modeling of the formation and transport of nanoparticles in silane plasmas

✍ Scribed by De Bleecker, Kathleen; Bogaerts, Annemie; Goedheer, Wim

Book ID: 120302440
Publisher: The American Physical Society
Year: 2004
Tongue: English
Weight: 96 KB
Volume: 70
Category: Article
ISSN: 1063-651X
DOI: 10.1103/PhysRevE.70.056407

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