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Spectroscopic diagnostics and modelling of silane microwave plasmas

✍ Scribed by Fantz, U

Book ID: 127325759
Publisher: Institute of Physics
Year: 1998
Tongue: English
Weight: 292 KB
Volume: 40
Category: Article
ISSN: 0741-3335
DOI: 10.1088/0741-3335/40/6/011

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