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Diagnostics and modeling of silane and methane Plasma CVD Processes

✍ Scribed by Dr. Paul B. Davies; Dr. Philip M. Martineau

Publisher: John Wiley and Sons
Year: 1992
Tongue: English
Weight: 840 KB
Volume: 4
Category: Article
ISSN: 0935-9648
DOI: 10.1002/adma.19920041104

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