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Thermodynamic Modeling of the Ti-Al-N System and Application to the Simulation of CVD Processes of the (Ti,Al)N Metastable Phase

✍ Scribed by Stéphanie Anderbouhr; Sandra Gilles; Elisabeth Blanquet; Claude Bernard; Roland Madar

Publisher: John Wiley and Sons
Year: 1999
Tongue: English
Weight: 528 KB
Volume: 5
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(199906)5:3<109::aid-cvde109>3.0.co;2-0

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