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The features of magnetosensitive sensors based on a field-effect hall probe

โœ Scribed by Baranochnikov, M. L.; Leonov, A. V.; Mordkovich, V. N.; Pazhin, D. M.


Book ID
119882210
Publisher
Springer
Year
2012
Tongue
English
Weight
206 KB
Volume
55
Category
Article
ISSN
0020-4412

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Thin films of Ni 80 Fe 20 (Permalloy) and structures as Ni 80 Fe 20 /NM/Ni 80 Fe 20 were used to build low cost rotation sensors. The structures were deposited onto oxidized Si wafers. NM denotes Cu or Al 2 O 3 layers. Angular dependencies of the planar Hall effect (PHE) are investigated for differe