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The fastest real time spectroscopic ellipsometry: applications and limitations for in situ and quality control

✍ Scribed by J.-P. Piel; J.-L. Stehle; O. Thomas

Book ID: 107864180
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 408 KB
Volume: 233
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90113-4

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