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The fabrication of thin GaAs cantilever beams for power sensor microsystem using RIE

✍ Scribed by Š Haščík; T Lalinský; J Kuzmík; M Porges; Ž Mozolová

Book ID: 103475399
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 257 KB
Volume: 47
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(96)00129-7

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