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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Investigation of boron and nitrogen ion beam implantation in gold thin films for ohmic MEMS switch contact improvement

✍ Scribed by Arrazat, B.; Inal, K.; Gergaud, P.

Book ID: 121342558
Publisher: IEEE
Year: 2013
Weight: 754 KB
Category: Article
ISBN: 1467359831
DOI: 10.1109/Transducers.2013.6627267

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