𝔖 Bobbio Scriptorium

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The fabrication of an electrostatic linear actuator by silicon micromachining

✍ Scribed by Fujita, H.; Omodaka, A.

Book ID: 114535504
Publisher: IEEE
Year: 1988
Tongue: English
Weight: 392 KB
Volume: 35
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.2524

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