✦ LIBER ✦
A micromachined tunable resonator fabricated by the CMOS post-process of etching silicon dioxide
✍ Scribed by Ching-Liang Dai; Wei-Chiang Yu
- Book ID
- 106184866
- Publisher
- Springer-Verlag
- Year
- 2006
- Tongue
- English
- Weight
- 629 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0946-7076
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