✦ LIBER ✦

The effects of deposition parameters on the crystallographic orientation of AIN films prepared by RF reactive sputtering

✍ Scribed by B Wang; Y.N. Zhao; Z He

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of substrate preparation and depo

✍ M.I Jones; I.R McColl; D.M Grant 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 398 KB

Effect of hydrogen addition on the prefe

✍ HwandashChul Lee; Ki-Young Lee; YoondashJoong Yong; Jai-Young Lee; GuendashHong 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 687 KB

Effect of the substrate bias voltage on

✍ Hwan-Chul Lee; Jai-Young Lee; Hyo-Jun Ahn 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 512 KB

The influence of the reactive gas flow o

✍ E. Janczak-Bienk; H. Jensen; G. Sørensen 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 573 KB

Effects of nitrogen flow rates on the gr

✍ K. Chakrabarti; J.J. Jeong; S.K. Hwang; Y.C. Yoo; C.M. Lee 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 268 KB

Effects of deposition pressure on the pr

✍ Quan-Bao Ma; Zhi-Zhen Ye; Hai-Ping He; Li-Ping Zhu; Bing-Hui Zhao 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 662 KB