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The Effect of UV treatment on the recovery characteristics of a-IGZO-based thin film transistors

✍ Scribed by Kyeong Min Yu, So Hyun Jeong, Byung Seong Bae, Eui-Jung Yun


Book ID
119937259
Publisher
The Korean Physical Society
Year
2012
Tongue
English
Weight
408 KB
Volume
61
Category
Article
ISSN
0374-4884

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## Abstract We demonstrate the influence of the contact resistance on the electrical properties of a‐IGZO thin‐film transistors (TFTs) with ZrO~2~ gate insulator grown by rf‐magnetron sputtering at room temperature by adopting various channel widths and lengths. These TFTs have all been processed a