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The effect of thermal annealing on the structural and mechanical properties of a-C:H thin films prepared by the CFUBM magnetron sputtering method

✍ Scribed by Yong Seob Park; Byungyou Hong

Book ID
116671270
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
291 KB
Volume
354
Category
Article
ISSN
0022-3093

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