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The Effect of TEOS/MTES Ratio on the Structural and Dielectric Properties of Porous Silica Films

โœ Scribed by Yu, Suzhu; Wong, Terence K. S.; Hu, Xiao; Pita, Kantisara

Book ID
121467354
Publisher
The Electrochemical Society
Year
2003
Tongue
English
Weight
341 KB
Volume
150
Category
Article
ISSN
0013-4651

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Effects of ion implantation on the surfa
Effects of ion implantation on the surface mechanical properties of solโ€“gel derived TEOS/MTES thin films
โœ D.A. Lucca; R. Ghisleni; M. Nastasi; L. Shao; Y.Q. Wang; J. Dong; A. Mehner ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 287 KB

A study of the effects of ion implantation of hybrid organic/inorganic modified silicate thin films on their surface mechanical properties is presented. The thin films were synthesized by sol-gel processing from tetraethylorthosilicate (TEOS) and methyltriethoxysilane (MTES) precursors and spin-coat