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The effect of substrate and annealing temperatures on the microstructure of La1.85Sr0.15CuO4 thin film in pulsed electron deposition process

✍ Scribed by L.M. Chen; W.T. Liu; F.G. Zeng; Y.F. Guo; P.G. Li; W.H. Tang


Book ID
116602073
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
467 KB
Volume
456
Category
Article
ISSN
0925-8388

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✍ Feng, Zuyong ;Chen, Wei ;Tan, Ooi Kiang πŸ“‚ Article πŸ“… 2009 πŸ› John Wiley and Sons 🌐 English βš– 322 KB

## Abstract Ba~0.6~Sr~0.4~TiO~3~ (BST) thin films with the thickness of 300 nm were deposited on Pt/SiO~2~/Si substrates at various deposition temperatures by RF magnetron sputtering technique, and their electric properties were investigated. Due to the high temperature annealing process at substra