𝔖 Bobbio Scriptorium
✦   LIBER   ✦

The effect of silicon substrate on thickness of SiO2thin film analysed by spectral reflectometry and interferometry

✍ Scribed by P. Hlubina; J. Luňáček; D. Ciprian

Book ID
106029255
Publisher
Springer
Year
2009
Tongue
English
Weight
301 KB
Volume
95
Category
Article
ISSN
0721-7269

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterization of silicon carbide thin
Characterization of silicon carbide thin films grown on Si and SiO2/Si substrates
✍ P. Zanola; E. Bontempi; C. Ricciardi; G. Barucca; L.E. Depero 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 227 KB

Due to its outstanding electrical and mechanical properties, silicon carbide (SiC) is considered a leading semiconducting material for high temperature sensors. Since the piezoresistive effect in SiC is highly anisotropic and exhibits a dependence on the crystal orientation, the role of the substra