Phase retrieval from the spectral interference signal used to measure thickness of SiO2thin film on silicon wafer

✍ Scribed by P. Hlubina; D. Ciprian; J. Luňáček; R. Chlebus

• Book ID: 106027600
• Publisher: Springer
• Year: 2007
• Tongue: English
• Weight: 520 KB
• Volume: 88
• Category: Article
• ISSN: 0721-7269
• DOI: 10.1007/s00340-007-2709-4