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The effect of process parameters on the chemical structure of pulsed laser deposited carbon nitride films

✍ Scribed by Bertóti, I.; Szörényi, T.; Antoni, F.; Fogarassy, E.

Book ID: 123036130
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 76 KB
Volume: 11
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(01)00558-1

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