Migration of incorporated phosphorus in
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Fumihiro Arifuku; Hiroshi Yoneyama; Hideo Tamura
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Article
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1979
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Elsevier Science
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English
β 337 KB
Almbxct -The mobility of phosphorus incorporated as a mass marker into tantalum anodic oxide films was investigetcd by mtans of ion microprobe mass analysis. If the transport number of tantalum ions for the film formation is ~ssumcd to be CotMant regardless of the oxidation current density chosen, t