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The Effect of Oxygen on the Work Function of Tungsten Gate Electrodes in MOS Devices

โœ Scribed by M. Grubbs; M. Deal; Y. Nishi; B. Clemens


Book ID
126734391
Publisher
IEEE
Year
2009
Tongue
English
Weight
133 KB
Volume
30
Category
Article
ISSN
0741-3106

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