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The effect of oxygen on secondary defect formation in MeV self-implanted silicon

✍ Scribed by R.A. Brown; O. Kononchuk; Z. Radzimski; G.A. Rozgonyi; F. Gonzalez


Book ID
114168727
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
395 KB
Volume
127-128
Category
Article
ISSN
0168-583X

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