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The effect of ion implantation on the lifetime of punches

✍ Scribed by R. Öchsner; A. Kluge; H. Ryssel; M. Stepper; Chr. Straede; J. Politiek

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
437 KB
Volume
51
Category
Article
ISSN
0257-8972

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Sohd benzene has been unplanted with mert-gas Ions atth energes rangmg from 16 to 100 keV Ihe small varuuon observed UI the relarwe concentration of the products has been found to depend mamly on The fact that the r&awe acsht of the nuclear and electromc noppmg mechantsms IS changmg along the ener\_