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On the thermal effect of ion implantation

✍ Scribed by Luigi M. Gratton; Luis Guzman; Antonio Miotello; Cristiana Tosello; Giorgio Wolf


Publisher
Elsevier Science
Year
1983
Weight
345 KB
Volume
209-210
Category
Article
ISSN
0167-5087

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πŸ“œ SIMILAR VOLUMES


Effect of ion energy on the implantation
✍ O. Puglisi; G. Marletta; S. Pignataro; G. Foti; A. Trovato; E. Rimini πŸ“‚ Article πŸ“… 1981 πŸ› Elsevier Science 🌐 English βš– 442 KB

Sohd benzene has been unplanted with mert-gas Ions atth energes rangmg from 16 to 100 keV Ihe small varuuon observed UI the relarwe concentration of the products has been found to depend mamly on The fact that the r&awe acsht of the nuclear and electromc noppmg mechantsms IS changmg along the ener\_