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The effect of deuterium passivation at different steps of CMOS processing on lifetime improvements of CMOS transistors

✍ Scribed by Jinju Lee; Epstein, Y.; Berti, A.C.; Huber, J.; Hess, K.; Lyding, J.W.

Book ID: 114537837
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 58 KB
Volume: 46
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.777177

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