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The effect of deposition parameters on the compressive stress in a-C: H thin films

✍ Scribed by Crouse, P.L.

Book ID: 123470873
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 387 KB
Volume: 2
Category: Article
ISSN: 0925-9635
DOI: 10.1016/0925-9635(93)90244-V

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