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The effects of deposition parameters on the optical performance of thin dielectric films

โœ Scribed by A.A.J. Al-Douri; O.S. Heavens

Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
492 KB
Volume
36
Category
Article
ISSN
0042-207X

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๐Ÿ“œ SIMILAR VOLUMES

Effect of process parameters on the opti
Effect of process parameters on the optical constants of thin metal films
โœ Tompkins, Harland G.; Baker, Jeffrey H.; Convey, Diana ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 78 KB ๐Ÿ‘ 2 views

In this study, we show that the optical constants of sputter-deposited chromium depend on the argon pressure used for the deposition. Higher argon pressure gives lower extinction coefficients. Sheet resistance measurements show that those materials with lower extinction coefficients also have lower