Effect of process parameters on the optical constants of thin metal films

✍ Scribed by Tompkins, Harland G.; Baker, Jeffrey H.; Convey, Diana

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 78 KB
• Volume: 29
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/(sici)1096-9918(200003)29:3<227::aid-sia730>3.0.co;2-w

✦ Synopsis

In this study, we show that the optical constants of sputter-deposited chromium depend on the argon pressure used for the deposition. Higher argon pressure gives lower extinction coefficients. Sheet resistance measurements show that those materials with lower extinction coefficients also have lower conductivity. Whereas the argon pressure strongly affects the resulting optical constants of the film material, the choice of substrate material does not affect the resulting optical constants of the film.