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Origin of Compressive Residual Stress in Polycrystalline Thin Films

✍ Scribed by Chason, E.; Sheldon, B. W.; Freund, L. B.; Floro, J. A.; Hearne, S. J.

Book ID: 118124401
Publisher: The American Physical Society
Year: 2002
Tongue: English
Weight: 117 KB
Volume: 88
Category: Article
ISSN: 0031-9007
DOI: 10.1103/physrevlett.88.156103

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