The effect of annealing upon the resistivity distribution in subsurface layers of silicon irradiated with hydrogen and helium ions

✍ Scribed by Bulgakov, Yu. V. ;Kuznetsov, N. V. ;Yatsenko, L. A.

• Publisher: John Wiley and Sons
• Year: 1980
• Tongue: English
• Weight: 176 KB
• Volume: 61
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2210610159