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The dependence of the resistance profile in silicon irradiated with hydrogen and helium ions on the ion energy and fluence

✍ Scribed by Bulgakov, Yu. V. ;Kolomenskaya, T. I. ;Kuznetsov, N. V. ;Yatsenko, L. A.


Publisher
John Wiley and Sons
Year
1980
Tongue
English
Weight
194 KB
Volume
61
Category
Article
ISSN
0031-8965

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