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The effect of annealing on the structure of cathodic arc deposited amorphous carbon nitride films

✍ Scribed by D.G. McCulloch; A.R. Merchant

Book ID: 114086110
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 266 KB
Volume: 290-291
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(96)09069-4

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