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The effect of a piezoelectric layer on the mechanical behavior of an electrostatic actuated microbeam

✍ Scribed by Zamanian, M; Khadem, S E; Mahmoodi, S N

Book ID: 120637759
Publisher: Institute of Physics
Year: 2008
Tongue: English
Weight: 621 KB
Volume: 17
Category: Article
ISSN: 0964-1726
DOI: 10.1088/0964-1726/17/6/065024

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