An approach to predicting static responses of electrostatically actuated microbeam under the effect of fringing field and Casimir force

✍ Scribed by Yu, Y.P.; Wu, B.S.

• Book ID: 121742567
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 900 KB
• Volume: 80
• Category: Article
• ISSN: 0020-7403
• DOI: 10.1016/j.ijmecsci.2014.01.015