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The dielectric response as a function of temperature and film thickness of fiber-textured (Ba,Sr)TiO[sub 3] thin films grown by chemical vapor deposition

✍ Scribed by Basceri, Cem; Streiffer, S. K.; Kingon, Angus I.; Waser, R.


Book ID
120071784
Publisher
American Institute of Physics
Year
1997
Tongue
English
Weight
454 KB
Volume
82
Category
Article
ISSN
0021-8979

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## Abstract Ba~0.6~Sr~0.4~TiO~3~ (BST) thin films with the thickness of 300 nm were deposited on Pt/SiO~2~/Si substrates at various deposition temperatures by RF magnetron sputtering technique, and their electric properties were investigated. Due to the high temperature annealing process at substra