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The determination of stresses in thin films; modelling elastic grain interaction

โœ Scribed by Welzel, U.; Leoni, M.; Mittemeijer, E. J.


Book ID
117994350
Publisher
Taylor and Francis Group
Year
2003
Tongue
English
Weight
357 KB
Volume
83
Category
Article
ISSN
1478-6435

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Out-of-plane stresses arising from grain
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Face-centered-cubic thin films often have mixed (1 1 1)/(1 0 0) fiber texture. These orientations can have very different in-plane stiffnesses, leading to the possibility of significant stress inhomogeneities. Previous X-ray studies appeared to confirm this, reporting much higher stresses in (1 1 1)