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The dependence of nanostructure etch rates on feature size

✍ Scribed by J.M.F. Zachariasse; A.N. Broers

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 715 KB
Volume: 30
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(95)00261-8

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