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Velocity and size dependences of the erosion rate in silicon

✍ Scribed by R.O. Scattergood; J.L. Routbort

Publisher: Elsevier Science
Year: 1981
Tongue: English
Weight: 483 KB
Volume: 67
Category: Article
ISSN: 0043-1648
DOI: 10.1016/0043-1648(81)90106-x

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