Growth of GaN Layers by One-, Two-, and
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Ohkawa, K. ;Hirako, A. ;Yoshitani, M.
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Article
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2001
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John Wiley and Sons
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English
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Subject classification: 73.61.Ey; 81.15.Kk; S7.14 One-, two-and three-flow metalorganic vapor phase epitaxy (MOVPE) methods have been compared in GaN growth, and each growth is analyzed by computational fluid dynamics (CFD). It is found that two-flow method shows better growth condition for achievin