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The density effects in sputtering of amorphous materials

✍ Scribed by V.I. Shulga

Book ID: 114164208
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 705 KB
Volume: 170
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(00)00255-x

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