✦ LIBER ✦

The chemical vapor deposition of SiO2 from teos

✍ Scribed by John E. Crowell; Laura L. Tedder; Hee-Chuen Cho; Frank M. Cascarano; Mark A. Logan

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 543 KB
Volume: 54-55
Category: Article
ISSN: 0368-2048
DOI: 10.1016/0368-2048(90)80299-p

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Activation energies in chemical vapour d

Activation energies in chemical vapour deposition kinetics of SiO2 films using TEOS chemistry

✍ Cristian Pavelescu; Irina Kleps 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 176 KB

Incubation Time during Chemical Vapor De

Incubation Time during Chemical Vapor Deposition of Si onto SiO2 from Silane

✍ Y. Kajikawa; T. Tsuchiya; S. Noda; H. Komiyama 📂 Article 📅 2004 🏛 John Wiley and Sons 🌐 English ⚖ 353 KB

Visible photoluminescence from the annea

Visible photoluminescence from the annealed TEOS SiO2

✍ M. Xu; S. Xu; Y.C. Ee; Clare Yong; J.W. Chai; S.Y. Huang; J.D. Long 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 227 KB

We report the visible photoluminescence (PL) excited by Ar-ion laser (514.5 nm) at room temperature from the TEOS SiO 2 films annealed under the protection of flowing N 2 . It was found that the PL peak position located at between 610 and 640 nm does not significantly change with the annealing tempe

Coating of TiO2 particles by chemical va

Coating of TiO2 particles by chemical vapor deposition of SiO2

✍ Quint. H. Powell; Prof. Toivo. T. Kodas; Dr. Bruce M. Anderson 📂 Article 📅 1996 🏛 John Wiley and Sons 🌐 English ⚖ 694 KB

The growth and in situ characterization

The growth and in situ characterization of chemical vapor deposited SiO2

✍ R. Iyer; R.R. Chang; D.L. Lile 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 474 KB

The chemical vapor deposition of TiB2 fr

The chemical vapor deposition of TiB2 from diborane

✍ H.O. Pierson; A.W. Mullendore 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 272 KB