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The angular distribution of atoms sputtered from a GaIn eutectic alloy target

✍ Scribed by Kevin M. Hubbard; Robert A. Weller; Duncan L. Weathers; T.A. Tombrello

Book ID
113279807
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
962 KB
Volume
36
Category
Article
ISSN
0168-583X

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A solid surface subjected to energetic ion bombardment generally develops characteristic structures, which may change the total and partial sputtering yields significantly. The change is caused by several competing effects, for instance, change of the effective projectile incidence angle, recapture