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Testing metallic impurity distributions in plasmachemically synthesized nitrides

✍ Scribed by Ya. K. Vaivads; G. L. Smilshkalne; Z. A. Krastin'sh

Book ID
104944521
Publisher
Springer
Year
1992
Tongue
English
Weight
280 KB
Volume
31
Category
Article
ISSN
1573-9066

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✍ Walter Lengauer πŸ“‚ Article πŸ“… 1990 πŸ› John Wiley and Sons 🌐 English βš– 657 KB

## Abstract The suitability of characterizing the nitrogen distributions in near‐surface regions of compact samples of TiN, ZrN, HfN, VN and NbN by means of a series of inductive __T__~c~ measurements with successive etching was investigated. The distribution profiles could be determined for TiN, Z